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Journal of Vacuum Science & Technology B : nanotechnology & microelectronics: materials, processing, measurement, & phenomena

Journal of Vacuum Science & Technology B : nanotechnology & microelectronics: materials, processing, measurement, & phenomena
紙雑誌雑誌タイトル
Published for the American Vacuum Society by the American Institute of Physics<Z53-Y133>
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Synthesis of silver-decorated titanium dioxide nanostructured films for enhanced visible light photocatalysis

Synthesis of silver-decorated titanium dioxide nanostructured films for enhanced visible light photocatalysis
デジタル記事
2024-12-01Journal of Vacuum Science & Technology B42 6
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Dynamic switching operation of diamond MOSFETs with NO2 p-type doping and Al2O3 gate insulation and passivation

Dynamic switching operation of diamond MOSFETs with NO2 p-type doping and Al2O3 gate insulation and passivation
デジタル記事
2024-08-26Journal of Vacuum Science & Technology B42
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Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness

Soft and hard trimming of imprint resist masks to fabricate silicon nanodisk arrays with different edge roughness
デジタル記事
2024-07-01Journal of Vacuum Science & Technology B42
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Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas

Characteristics of a hybrid radio frequency capacitively and inductively coupled plasma using hydrogen gas
デジタル記事
2024-07-01Journal of Vacuum Science & Technology B42
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Upgrading of the modified Knudsen equation and its verification for calculating the gas flow rate through cylindrical tubes

Upgrading of the modified Knudsen equation and its verification for calculating the gas flow rate through cylindrical tubes
デジタル記事
2024-06-12Journal of Vacuum Science & Technology B42
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Future of plasma etching for microelectronics: Challenges and opportunities

Future of plasma etching for microelectronics: Challenges and opportunities
デジタル記事
2024-06-07Journal of Vacuum Science & Technology B42
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Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents

Sodium adsorption on nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents
デジタル記事
2024-03-01Journal of Vacuum Science & Technology B42 2
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Plasma-assisted annealing of Pt-doped rutile TiO2 nanoparticles for enhanced decomposition and bacterial inactivation under general lighting

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デジタル記事
2024-01-11Journal of Vacuum Science & Technology B42 1p.012203-
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Influence of Al2O3 atomic-layer deposition temperature on positive-bias instability of metal/Al2O3/β-Ga2O3 capacitors

Influence of Al2O3 atomic-layer deposition temperature on positive-bias instability of metal/Al2O3/β-Ga2O3 capacitors
デジタル記事
2024-01-01Journal of Vacuum Science & Technology B42
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Electron emission properties of titanium nitride coated volcano-structured silicon emitters

Electron emission properties of titanium nitride coated volcano-structured silicon emitters
デジタル記事
2024-01-01Journal of Vacuum Science & Technology B42 1
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Influence of gate material and diamond surface termination on current conduction in metal/Al2O3/diamond capacitors

Influence of gate material and diamond surface termination on current conduction in metal/Al2O3/diamond capacitors
デジタル記事
2024-01-01Journal of Vacuum Science & Technology B42
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Temperature effects on electrospray current from an externally wetted EMI-Im ionic liquid ion source

Temperature effects on electrospray current from an externally wetted EMI-Im ionic liquid ion source
デジタル記事
2023-12-01Journal of Vacuum Science & Technology B41 6
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Influence of vacuum annealing on mechanical characteristics of focused ion beam fabricated silicon nanowires

Influence of vacuum annealing on mechanical characteristics of focused ion beam fabricated silicon nanowires
デジタル記事
2023-11-16Journal of Vacuum Science & Technology B41 6
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Permeation of oxygen and water into a plasma-enhanced chemical vapor deposited silicon nitride film as function of deposition pressure

Permeation of oxygen and water into a plasma-enhanced chemical vapor deposited silicon nitride film as function of deposition pressure
デジタル記事
2023-10-31Journal of Vacuum Science & Technology B41
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X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline
デジタル記事
2023-10-11Journal of Vacuum Science & Technology B41 6
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Metal-pattern preparation based on selective deposition using soft organofluorine surfaces

Metal-pattern preparation based on selective deposition using soft organofluorine surfaces
デジタル記事
2023-09-01Journal of Vacuum Science & Technology B41 5
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Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit

Investigation of the deposition of α-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit
デジタル記事
2023-09-01Journal of Vacuum Science & Technology B41 5p.052210-
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Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy

Effect of annealing on focused ion beam induced surface damages in silicon analyzed by micro-Raman spectroscopy
デジタル記事
2023-09-01Journal of Vacuum Science & Technology B41 5
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Cluster-induced desorption/ionization mass spectrometry of Ir(ppy)3

Cluster-induced desorption/ionization mass spectrometry of Ir(ppy)3
デジタル記事
2023-09-01Journal of Vacuum Science & Technology B41
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