高電圧パルス列駆動大気圧過渡グローマイクロプラズマを用いた無定形炭素膜の作製(特集 パルスパワーの最新動向)

• 資料種別: 記事
• タイトル: 高電圧パルス列駆動大気圧過渡グローマイクロプラズマを用いた無定形炭素膜の作製
• 著者・編者: 井深 真治; 五十嵐 晃一; 菊地 淳 他
• シリーズタイトル: 特集 パルスパワーの最新動向
• 著者標目: 井深 真治; 五十嵐 晃一; 菊地 淳
• 並列タイトル等: Amorphous-carbon film deposition using atmospheric pressure transient glow microplasma powered by high-voltage pulse train
• タイトル（掲載誌）: 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
• 巻号年月日等（掲載誌）: 130(6) 2010.6
• 掲載巻: 130
• 掲載号: 6
• 掲載ページ: 543～548
• 掲載年月日（W3CDTF）: 2010-06
• ISSN（掲載誌）: 0385-4205
• ISSN-L（掲載誌）: 0385-4205
• 出版事項（掲載誌）: 東京 : 電気学会
• 出版地（国名コード）: JP
• 本文の言語コード: jpn
• 件名標目: 大気圧放電; 過渡グロー放電; マイクロプラズマ; 無定形炭素; ダイヤモンドライクカーボン; atmosperic pressure discharge; transient glow discharge; microplasma; amorphous-carbon; diamond-like-carbon
• NDLC: ZN31
• 対象利用者: 一般
• 所蔵機関: 国立国会図書館
• 請求記号: Z16-793
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館雑誌記事索引; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 10692762; http://id.ndl.go.jp/bib/10692762
• 整理区分コード: 632

• 要約等: We discussed amorphous-carbon, including diamond-like-carbon (DLC), film deposition using atmospheric pressure transient glow-microplasmas with a miniature gas flow. We developed a novel scheme for generating the transient glow microdischarge powered by high-voltage pulse trains. They were obtained by a burst pulse generator with a nonlinear transmission line (NLTL), which consisted of ceramic capacitors as a nonlinear element. Repetitive high-voltage burst pulses with a pulse width of 40 ns, the equivalent frequency of 12.5 MHz, were generated. A stabilization effect of the highly repetitive pulse trains on the discharge made it possible to deposit the amorphous-carbon film on a stainless steel plate cathode under atmospheric pressure with the deposition rate of 1.5<i>μ</i>/min. The film was characterized using SEM observation, Raman spectroscopic analysis and hardness measurement with a nanoindentor.
• DOI: 10.1541/ieejfms.130.543
• オンライン閲覧公開範囲: インターネット公開
• 連携機関・データベース: 科学技術振興機構 : J-STAGE; http://www.jstage.jst.go.jp

• 要約等: We discussed amorphous-carbon, including diamond-like-carbon (DLC), film deposition using atmospheric pressure transient glow-microplasmas with a miniature gas flow. We developed a novel scheme for generating the transient glow microdischarge powered by high-voltage pulse trains. They were obtained by a burst pulse generator with a nonlinear transmission line (NLTL), which consisted of ceramic capacitors as a nonlinear element. Repetitive high-voltage burst pulses with a pulse width of 40 ns, the equivalent frequency of 12.5 MHz, were generated. A stabilization effect of the highly repetitive pulse trains on the discharge made it possible to deposit the amorphous-carbon film on a stainless steel plate cathode under atmospheric pressure with the deposition rate of 1.5<i>μ</i>/min. The film was characterized using SEM observation, Raman spectroscopic analysis and hardness measurement with a nanoindentor.
• DOI: 10.1541/ieejfms.130.543; https://doi.org/10.1541/ieejfms.130.543
• 関連情報（URI）: http://id.ndl.go.jp/bib/10692762; https://ndlsearch.ndl.go.jp/books/R000000004-I10692762; http://www.jstage.jst.go.jp/article/ieejfms/130/6/130_6_543/_pdf
• 参照: Atmospheric dc discharges with miniature gas flow as microplasma generation method; https://cir.nii.ac.jp/crid/1360011146501750528; Atmospheric pressure transient micro glow discharge driven by burst pulse generator with nonlinear transmission line; https://cir.nii.ac.jp/crid/1361137046528258688; Principles of Plasma Discharges and Materials Processing; https://cir.nii.ac.jp/crid/1361699993469112960; High-Power Pulsed RF Extraction From Nonlinear Lumped Element Transmission Lines; https://cir.nii.ac.jp/crid/1362544421118270976; 50 years of RF and microwave sampling; https://cir.nii.ac.jp/crid/1362825893510598528; Fast high-voltage pulse generator with nonlinear transmission line for high repetition rate operation; https://cir.nii.ac.jp/crid/1362825893979085696; Atmospheric pressure plasma processing with microstructure electrodes and microplanar reactors; https://cir.nii.ac.jp/crid/1363388845799126400; 最近の話題を追って（Ｉ）ＤＬＣ膜の合成に関するいくつかの試み; https://cir.nii.ac.jp/crid/1390001204117995392; 大気中における高繰り返し過渡グローマイクロ放電の生成と発光特性の評価; https://cir.nii.ac.jp/crid/1390001204594188032; Generation of Atmospheric Pressure Transient Glow Discharge in Microgap Electrode with Nanosecond Pulsed Voltage; https://cir.nii.ac.jp/crid/1390282679570302848; セラミックコンデンサを用いた非線形伝送線路による高電圧パルスの発生; https://cir.nii.ac.jp/crid/1390282679575931776; Synthesis of diamond-like carbon films by nanopulse plasuma chemical vapor deposition at subatmospheric pressure; https://cir.nii.ac.jp/crid/1390282681243194112; 大気圧グロー放電の発生と応用 ２．大気圧グロー放電の発生; https://cir.nii.ac.jp/crid/1390282681488632704
• 連携機関・データベース: 国立情報学研究所 : CiNii Research; https://cir.nii.ac.jp/
• 提供元機関・データベース: Japan Link Center; https://japanlinkcenter.org/top; 雑誌記事索引データベース; https://ndlsearch.ndl.go.jp; Crossref; https://www.crossref.org; CiNii Articles
• 書誌ID（NDLBibID）: 10692762; http://id.ndl.go.jp/bib/10692762
• NII論文ID: 10026382255