並列タイトル等シリコン タンケッショウ ノ マイクロ マモウ
Microwear of Si Single Crystal
タイトル（掲載誌）総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
一般注記Microtribology of Silicon single crystals is one of the important factors for the practical use of MEMS. In this study, the effect of crystal orientation on microwear of Silicon single crystal and the wear structure were mainly investigated. Microfriction experiments using atomic force / friction force microscope (AFM / FFM) were carried out to investigate the effect of crystal orientation on the microwear depth of Silicon single crystals. In these experiments, the scanning-scratching directions of a tip of AFM / FFM were <100> and <110> on Si(lOO) surface and <112> on Si(lll) surface. As a result, it was found that the depth of the wear marks generated on Silicon surfaces increased in the following order: <112>, <100>, <100>. Cross-sectional TEM observations of the microwear marks were carried out. As a result, it was found that the small dislocation loops were generated in the surface region at the first stage of the microwear, and the size and the number of dislocations increased with the oroeress of the microwear.
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/1622
一次資料へのリンクURLhttp://repository.aitech.ac.jp/dspace/bitstream/11133/1622/1/%e7%b7%8f%e7%a0%945%e5%8f%b7%28P51-54%29.pdf
連携機関・データベース国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）