並列タイトル等カーボン ナノ チューブ ヲ モチイタ コウ アスペクト ヒ ナノ カコウ ト TEM ナイ ソノバ カンサツ ニヨル カコウ ゲンリ ノ カイメイ
High-Aspect-Ratio Nanofabrication of Carbon Materials Using CNT Probe and TEM in-situ Observations of Their Process
タイトル(掲載誌)総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.
一般注記We have developed a fabrication method for a high-aspect-ratio nanometer-scale pit using a carbon nanotube as a scanning tunneling microscope probe. Nanometer-scale pits were fabricated on low-resistivity single crystal silicon in an ambient pressure and room temperature. The results of our experiment show that the shape fabricated was changed from the pit to the mound increasing with the bias voltage. Furthermore,we tried to fabricate the nanometer-scale line fabrications with high-aspect-ratio. The process mechanism of the nanofabrication by STM method was also tried to clarify byTEM in-situ observations during fabrication process. The field evaporation of the specimen around the probe was observed without dislocations and strains. Therefore,the physical origin of this nanometer-scale fabrication using STM was considered to be the field evaporation mechanism.
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/2093
一次資料へのリンクURLhttp://repository.aitech.ac.jp/dspace/bitstream/11133/2093/1/%e7%b7%8f%e7%a0%9414%e5%8f%b7%28P69-72%29.pdf
連携機関・データベース国立情報学研究所 : 学術機関リポジトリデータベース(IRDB)(機関リポジトリ)