Proceedings of the Symposium on Silicon Nitride Thin Insulating Films / edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.

• 資料種別: 図書
• タイトル: Proceedings of the Symposium on Silicon Nitride Thin Insulating Films / edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
• シリーズタイトル: Proceedings ; v. 83-8
• タイトル標目: Proceedings (Electrochemical Society) ; v. 83-8.
• 著者標目: Symposium on Silicon Nitride Thin Insulating Films (1983 : San Francisco, Calif.); Kapoor, Vikram J.; Stein, Herman J.; Electrochemical Society. Dielectrics and Insulation Division.; Electrochemical Society. Electronics Division.
• 出版事項: Pennington, N.J. (10 S. Main St., Pennington 08534-2696) : Electrochemical Society
• 出版年月日等: c1983.
• 出版年（W3CDTF）: 1983
• 数量: ix, 519 p. : ill. ; 23 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Thin film devices -- Congresses.; Silicon nitride -- Congresses.
• LCC: TK7872.T55
• DDC: 621.381/7
• NDLC: M15; ND
• 一般注記: Papers presented at the symposium held May 11-13, 1983 in San Francisco, Calif.
• 書誌注記: Includes bibliographical references and index.
• 所蔵機関: 国立国会図書館
• 請求記号: M15-A1763
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000003124029; http://id.ndl.go.jp/bib/000003124029
• LC control number: 83082039; https://lccn.loc.gov/83082039
• 整理区分コード: 211