Advanced metallization for ULSI applications : Conference : Oct 1991, Murray Hill, NJ.

著者: University of California, Berkeley. Continuing Education in Engineering.

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一般注記：: Papers.Also held in Tokyo. Formerly known as Workshop on tungsten and other advanced metals for ULSI applications. (Materials Research Society Confere...

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資料種別: 図書
ISBN: 1558991522
ISSN: 1048-0854
タイトル: Advanced metallization for ULSI applications : Conference : Oct 1991, Murray Hill, NJ.
著者標目: University of California, Berkeley. Continuing Education in Engineering.
出版事項: Pittsburgh : Materials Research Society
出版年月日等: c1992.
出版年（W3CDTF）: 1992
数量: v.
並列タイトル等: Also held in Tokyo. Formerly known as Workshop on tungsten and other advanced metals for ULSI applications. (Materials Research Society Conference Proceedings)
advanced metallization ; ULSI applications ; metallization
NDLC: M17
PD
一般注記: Papers.
Also held in Tokyo. Formerly known as Workshop on tungsten and other advanced metals for ULSI applications. (Materials Research Society Conference Proceedings)
Index term: advanced metallization ; ULSI applications ; metallization.
BL shelfmark: 0696.9155 1992.
所蔵機関: 国立国会図書館
請求記号: M17-94-0637
連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
書誌ID（NDLBibID）: 000003493617
http://id.ndl.go.jp/bib/000003493617
UKMARC番号: G01956347
整理区分コード: 215