Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001 : San Diego, USA. : Jul 2001, San Diego, CA. (SPIE Proceedings ; 4468)
Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001 : San Diego, USA. : Jul 2001, San Diego, CA.