Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001 : San Francisco, USA. : MEMS and MOEMS conference : Oct 2001, San Francisco, CA.
(SPIE Proceedings ; 4558)
国立国会図書館請求記号
M17-03-4977
国立国会図書館書誌ID
000004247818
資料種別
図書
著者
Semiconductor Equipment and Materials International (SEMI)ほか