Characterization of high Ge content SiGe heterostructures and graded alloy layers using spectroscopic ellipsometry [microform] / A.R. Heyd, S.A. Alterovitz, E.T. Croke
原資料の出版事項: [Washington, D.C. ; Springfield, Va. : National Aeronautics and Space Administration : National Technical Information Service, distributor, 1995]