Microprocesses and nanotechnology 2002 : 2002 international microprocesses and nanotechnology conference : digest of papers : November 6-8, 2002 : Tokyo, Japan : Nov 2002, Tokyo, Japan.
Microprocesses and nanotechnology 2002 : 2002 international microprocesses and nanotechnology conference : digest of papers : November 6-8, 2002 : Tokyo, Japan : Nov 2002, Tokyo, Japan.