Micro-electro-mechanical systems (MEMS) -- 2003 -- : presented at the 2003 ASME international mechanical engineering congress : November 15-21, 2003 : Washington, D.C. : Nov 2003, Washington, DC.
Papers."This is the 13th year MEMS-related symposia have been offered at the International Mechanical Engineering Congress and Exposition (IMECE) " --...
"This is the 13th year MEMS-related symposia have been offered at the International Mechanical Engineering Congress and Exposition (IMECE) " -- foreword.
書誌注記
Includes bibliographical references and author index.