Materials, technology and reliability for advanced interconnects and low-k dielectrics -- 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A. : symposium F, "materials, technology and reliability for advanced interconnects and low-k dielectrics" : 2004 MRS spring meeting : Apr 2004, San Francisco, CA.
(Materials Research Society Symposia Proceedings ; 812)