Micro- and nanosystems -- materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. : symposium J, "micro- and nanosystems -- materials and devices" : 2005 MRS spring meeting : Mar 2005, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 872)
Micro- and nanosystems -- materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. : symposium J, "micro- and nanosystems -- materials and devices" : 2005 MRS spring meeting : Mar 2005, San Francisco, CA.
(Materials Research Society Symposia Proceedings ; 872)