Material systems and processes for three-dimensional micro- and nanoscale fabrication and lithography : April 13-17, 2009 : San Francisco, California, USA. : MRS spring meeting 2009 : Apr 2009, San Francisco, CA.
(Materials Research Society Symposia Proceedings ; 1179)
国立国会図書館請求記号
M17-10-1002
国立国会図書館書誌ID
000010579499
資料種別
図書
著者
Materials Research Society. Meeting (2009 : San Francisco, Calif.)