Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. : symposium E, "science and technology of chemical mechanical planarization (CMP)" : 2009 MRS spring meeting : Apr 2009, San Francisco, CA.

• 資料種別: 図書
• ISBN: 9781605111308
• タイトル: Science and technology of chemical mechanical planarization (CMP) : symposium held April 14-16, 2009, San Francisco, California, U.S.A. : symposium E, "science and technology of chemical mechanical planarization (CMP)" : 2009 MRS spring meeting : Apr 2009, San Francisco, CA.
• シリーズタイトル: Materials Research Society Symposia Proceedings ; 1157
• タイトル標目: Materials Research Society symposia proceedings ; v. 1157.
• 著者標目: Kumar, Ashok, 1962-; Materials Research Society. Meeting (2009 : San Francisco, Calif.) . Symposium E.
• 出版事項: Warrendale : Materials Research Society
• 出版年月日等: c2010.
• 出版年（W3CDTF）: 2010
• 数量: ix, 165 p. : ill. ; 24 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Chemical mechanical planarization -- Congresses.; Semiconductors -- Design and construction -- Congresses.
• NDLC: M17
• 一般注記: Papers.
• 書誌注記: Includes bibliographical references and indexes.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-10-3973
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000010967152; http://id.ndl.go.jp/bib/000010967152
• OCLC番号: 611870712; https://www.worldcat.org/oclc/611870712
• 整理区分コード: 215