MOEMS and miniaturized systems 10 : 24-26 January 2011 : San Francisco, California, United States. : 10th MOEMS and miniaturized systems conference : MOEMS-MEMS symposium of SPIE photonics west 2011 : Jan 2011, San Francisco, CA. (SPIE Proceedings ; 7930)
MOEMS and miniaturized systems 10 : 24-26 January 2011 : San Francisco, California, United States. : 10th MOEMS and miniaturized systems conference : MOEMS-MEMS symposium of SPIE photonics west 2011 : Jan 2011, San Francisco, CA.