Micromachining and microfabrication process technology 17 : 24 and 26 January 2012 : San Francisco, California, United States : Jan 2012, San Francisco, CA. (SPIE Proceedings ; 8248)
Micromachining and microfabrication process technology 17 : 24 and 26 January 2012 : San Francisco, California, United States : Jan 2012, San Francisco, CA.