MEMS and nanotechnology, volume 5 : proceedings of the 2015 annual conference on experimental and applied mechanics : 2015 SEM annual conference and exposition on experimental and applied mechanics : annual meeting of the Society for Experimental Mechanics : 16th-ISMAN : 16th international symposium on MEMS and nanotechnology : Jun 2015, Costa Mesa, CA.

• 資料種別: 図書
• ISBN: 9783319224572
• ISSN（シリーズ）: 2191-5644
• タイトル: MEMS and nanotechnology, volume 5 : proceedings of the 2015 annual conference on experimental and applied mechanics : 2015 SEM annual conference and exposition on experimental and applied mechanics : annual meeting of the Society for Experimental Mechanics : 16th-ISMAN : 16th international symposium on MEMS and nanotechnology : Jun 2015, Costa Mesa, CA.
• シリーズタイトル: Conference Proceedings of the Society for Experimental Mechanics Series
• タイトル標目: Conference proceedings of the Society for Experimental Mechanics series.
• 著者標目: Annual Conference on Experimental and Applied Mechanics (2015 : Costa Mesa, C.A.); Prorok, Barton C.; Starman, LaVern.; Society for Experimental Mechanics.
• 出版事項: Cham : Springer (出版)
• 出版年月日等: [2016]; 著作権日付 : ©2016
• 出版年（W3CDTF）: 2016
• 数量: vii, 108 pages
• 大きさ: 29 cm.
• 出版地（国名コード）: CH
• 本文の言語コード: eng
• ジャンル・形式用語: Conference papers and proceedings.
• 表現種別: text
• 機器種別: unmediated
• キャリア種別: volume
• 件名標目: Nanotechnology--Congresses.; Microelectromechanical systems--Congresses.; Mechanics, Applied--Congresses.; TECHNOLOGY & ENGINEERING / Engineering (General); TECHNOLOGY & ENGINEERING / Reference; Mechanics, Applied.; Microelectromechanical systems.; Nanotechnology.
• LCC: T174.7
• DDC: 620.5
• NDLC: M17
• 対象利用者: 一般
• 一般注記: Papers.
• 書誌注記: Includes bibliographical references.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-16-452
• 関連情報（DOI）: 10.1007/978-3-319-22458-9
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 026784758; http://id.ndl.go.jp/bib/026784758
• 目録規則: RDA
• 整理区分コード: 215

• 要約等: The 16th International Symposium on MEMS and Nanotechnology, Volume 5 of the Proceedings of the 2015 SEM Annual Conference & Exposition on Experimenta...