数量1 volume (various pagings)
並列タイトル等Smart sensors, actuators, and MEMS 8 : 8-10 May 2017 : Barcelona, Spain
SPIE. microtechnologies
一般注記Papers.
"This conference program suited well the overall goal of the SPIE Microtechnologies event, completing the scope of other concurrent conferences: it went a step further into devices than the Nanotechnology VIII conference and complemented the type of devices envisioned in the Bio-MEMS and Medical Microdevices III conference."--Introduction.
書誌注記Includes bibliographical references and author index.