Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California

• 資料種別: 図書
• ISBN: 0819413631
• タイトル: Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California
• 著者・編者: Kevin M. Monahan, editor
• 著者標目: Monahan, Kevin M.; https://ci.nii.ac.jp/author/DA08754617; Society of Photo-optical Instrumentation Engineers; https://ci.nii.ac.jp/author/DA00848546
• 出版事項: SPIE Optical Engineering Press
• 出版年月日等: c1994
• 出版年（W3CDTF）: 1994
• 大きさ: 27 cm
• 出版地（国名コード）: us
• 本文の言語コード: en
• 件名標目: Electronic industries -- Production control -- Congresses; Semiconductors -- Design and construction -- Congresses; Process control -- Congresses; Integrated circuits -- Measurement -- Congresses
• LCC: TK7836
• 対象利用者: 一般
• 一般注記: Includes bibliographical references
• 関連情報: Critical reviews of optical science and technology; https://cir.nii.ac.jp/crid/1130282270437036160
• 関連情報（URI）: https://ci.nii.ac.jp/ncid/BA26301618#entity; https://lccn.loc.gov/94027970
• 掲載誌: Critical reviews of optical science and technology; https://cir.nii.ac.jp/crid/1130282270437036160
• 連携機関・データベース: 国立情報学研究所 : CiNii Research
• 提供元機関・データベース: CiNii Books; https://ci.nii.ac.jp/books
• NACSIS書誌ID（NCID）: https://ci.nii.ac.jp/ncid/BA26301618 : BA26301618
• LC control number: 94027970; https://lccn.loc.gov/94027970