著者・編者editors, John J. Boeckl ...[et al.]
一般注記"Symposium XX, 'Microelectromechanical System - Materials and Devices,' held from December 2 to December 4, 2013 at the MRS Fall Meeting, ..." --preface
Includes bibliographical references and indexes
Other editors: Robert N. Candler, Frank W. DelRio, Anna Fontcuberta i Morral, Chennupati Jagadish, Chris Keimei, Helena Silva, Tobias Voss, Qihua Xiong
関連情報Materials Research Society symposium proceedings
掲載誌Materials Research Society symposium proceedings
連携機関・データベース国立情報学研究所 : CiNii Research
NACSIS書誌ID(NCID)https://ci.nii.ac.jp/ncid/BB16858889 : BB16858889