Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA

• 資料種別: 図書
• ISBN: 0931288304
• タイトル: Electron beam interactions with solids for microscopy, microanalysis & microlithography : proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
• 著者・編者: edited by David F. Kyser ... [et al.] ; managing editor, Daniel Halibey
• 著者標目: Pfefferkorn Conference; https://ci.nii.ac.jp/author/DA03914454; Kyser, David F.; https://ci.nii.ac.jp/author/DA03914760
• 出版事項: Scanning Electron Microscopy, Inc.
• 出版年月日等: c1984
• 出版年（W3CDTF）: 1984
• 大きさ: 29 cm
• 出版地（国名コード）: us
• 件名標目: Solids -- Effect of radiation on -- Congresses; Electron beams -- Congresses; Electrons -- Scattering -- Congresses; Backscattering -- Congresses; Microlithography -- Congresses; Electron energy loss spectroscopy -- Congresses
• LCC: QC176.8.R3
• 対象利用者: 一般
• 一般注記: Includes bibliographies and indexes
• 関連情報（URI）: https://ci.nii.ac.jp/ncid/BA06299513#entity; https://lccn.loc.gov/88140898
• 連携機関・データベース: 国立情報学研究所 : CiNii Research
• 提供元機関・データベース: CiNii Books; https://ci.nii.ac.jp/books
• NACSIS書誌ID（NCID）: https://ci.nii.ac.jp/ncid/BA06299513 : BA06299513
• LC control number: 88140898; https://lccn.loc.gov/88140898