High Purity Silicon VI : proceedings of the sixth International Symposium

• 資料種別: 図書
• ISBN: 1566772842
• タイトル: High Purity Silicon VI : proceedings of the sixth International Symposium
• 著者・編者: editors C.L. Claeys ... [et al.] ; sponsored by the Electrochemical Society, Inc., Electronics Division
• 著者標目: International Symposium on High Purity Silicon; Claeys, C. L.; Electrochemical Society. Electronics Division; https://ci.nii.ac.jp/author/DA0357072X; Society of Photo-optical Instrumentation Engineers; https://ci.nii.ac.jp/author/DA00848546; Electrochemical Society. Meeting; https://ci.nii.ac.jp/author/DA03398898
• 出版事項: Published in cooperation with SPIE-the International Society for Optical Engineering; Electrochemical Society, c2000
• 出版年（W3CDTF）: 2000
• 大きさ: 24 cm
• 出版地（国名コード）: us
• 本文の言語コード: en
• 件名標目: Silicon crystals -- Congresses; Crystal growth -- Congresses; Semiconductor wafers -- Congresses
• LCC: TK7871.15.S55
• 対象利用者: 一般
• 一般注記: "... held in Phoenix, Arizona at the 198th Meeting of the Electrochemical Society, October 22-27, 2000. The Symposium, sponsored by the Electronics Division of the Electrochemical Society and by SPIE"--on pref; Includes bibliographical references and indexes
• 関連情報: Proceedings; https://cir.nii.ac.jp/crid/1130282269217551104; https://cir.nii.ac.jp/crid/1130282269273401728
• 関連情報（URI）: https://ci.nii.ac.jp/ncid/BA54509162#entity; https://lccn.loc.gov/00106821
• 掲載誌: Proceedings; https://cir.nii.ac.jp/crid/1130282269217551104; https://cir.nii.ac.jp/crid/1130282269273401728
• 連携機関・データベース: 国立情報学研究所 : CiNii Research
• 提供元機関・データベース: CiNii Books; https://ci.nii.ac.jp/books
• NACSIS書誌ID（NCID）: https://ci.nii.ac.jp/ncid/BA54509162 : BA54509162
• LC control number: 00106821; https://lccn.loc.gov/00106821