Magnetic field assisted finishing of ultra-lightweight and high-resolution MEMS x-ray micro-pore optics

• 資料種別: 記事
• タイトル: Magnetic field assisted finishing of ultra-lightweight and high-resolution MEMS x-ray micro-pore optics
• 著者標目: Raul E. Riveros; Hitomi Yamaguchi; https://orcid.org/0000-0002-3200-2575; Ikuyuki Mitsuishi; https://orcid.org/0000-0002-9901-233x; Utako Takagi; Yuichiro Ezoe; Fumiki Kato; https://orcid.org/0000-0001-7877-1567; Susumu Sugiyama; Noriko Yamasaki; Kazuhisa Mitsuda
• 出版年月日等: 2009-05-07
• 出版年（W3CDTF）: 2009-05-07
• 寄与者: René Hudec; Ladislav Pina
• タイトル（掲載誌）: SPIE Proceedings
• 巻号年月日等（掲載誌）: 7360
• 掲載巻: 7360
• 掲載ページ: 736013-
• 掲載年月日（W3CDTF）: 2009-05-07
• ISSN（掲載誌）: 0277786X
• 出版事項（掲載誌）: SPIE
• 対象利用者: 一般
• DOI: 10.1117/12.823961
• 作成日（W3CDTF）: 2009-04-08
• 参照: Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics; https://cir.nii.ac.jp/crid/1360283693353370624
• 連携機関・データベース: 国立情報学研究所 : CiNii Research; https://cir.nii.ac.jp/
• 提供元機関・データベース: Crossref; https://www.crossref.org

• 要約等: In recent years, X-ray telescopes have been shrinking in both size and weight to reduce cost and volume on space flight missions. Current designs focu...