Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: I. Transient behaviour of electrodynamics and power deposition

• 資料種別: 記事
• タイトル: Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas: I. Transient behaviour of electrodynamics and power deposition
• 著者標目: Yu-Ru Zhang; Xiang Xu; Annemie Bogaerts; You-Nian Wang
• 出版年月日等: 2011-12-12
• 出版年（W3CDTF）: 2011-12-12
• タイトル（掲載誌）: Journal of Physics D: Applied Physics
• 巻号年月日等（掲載誌）: 45 1
• 掲載巻: 45
• 掲載号: 1
• 掲載ページ: 015202-
• 掲載年月日（W3CDTF）: 2011-12-12
• ISSN（掲載誌）: 00223727
• 出版事項（掲載誌）: IOP Publishing
• 件名標目: Surfaces, Coatings and Films; Acoustics and Ultrasonics; Condensed Matter Physics; Electronic, Optical and Magnetic Materials
• 対象利用者: 一般
• DOI: 10.1088/0022-3727/45/1/015202
• 作成日（W3CDTF）: 2011-12-12
• 著作権情報: https://iopscience.iop.org/page/copyright; https://iopscience.iop.org/info/page/text-and-data-mining
• 関連情報（URI）: https://iopscience.iop.org/article/10.1088/0022-3727/45/1/015202; https://iopscience.iop.org/article/10.1088/0022-3727/45/1/015202/pdf
• 参照: Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method; https://cir.nii.ac.jp/crid/1360847874818334208
• 連携機関・データベース: 国立情報学研究所 : CiNii Research
• 提供元機関・データベース: Crossref; https://www.crossref.org

• 要約等: <jats:title>Abstract</jats:title> <jats:p>A two-dimensional self-consistent fluid model coupled with the full set of Maxwell equations ...