Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 宮川 鈴衣奈楊 士波三宅 秀人 他
- Series Title
- Alternative Title
- Control of interlayer on MOVPE growth of AlN on sapphire substrate
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 111(291):2011.11.17・18
- Volume
- 111
- Issue
- 291