バックグラインドテープの材料設計と評価技術 (総説特集 半導体を支える材料技術)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 稲田 太郎久米 雅士
- Series Title
- Alternative Title
- Material Design and Evaluation Technology of Backgrind Tape
- Periodical title
- 日本ゴム協会誌 = Journal of the Society of Rubber Science and Technology, Japan
- No. or year of volume/issue
- 85(2):2012.2
- Volume
- 85
- Issue
- 2