プラズマCVD法によ...

プラズマCVD法により作製した窒素添加DLCの構造とトライボロジー特性

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プラズマCVD法により作製した窒素添加DLCの構造とトライボロジー特性

Call No. (NDL)
Z17-291
Bibliographic ID of National Diet Library
023459179
Material type
記事
Author
山本 修二ほか
Publisher
東京 : 表面技術協会
Publication date
2012-01
Material Format
Paper
Journal name
表面技術 = Journal of the Surface Finishing Society of Japan 63(1):2012.1
Publication Page
p.35-40
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Paper Digital

Material Type
記事
Author/Editor
山本 修二
日高 徳昭
川名 淳雄 他
Alternative Title
Structure and Tribological Behavior of Nitrogenated Diamond-Like Carbon Films Prepared by Plasma CVD
Periodical title
表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue
63(1):2012.1
Volume
63
Issue
1
Pages
35-40