Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
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CiNii Research
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 石黒 啓太河野 昭彦関口 淳 他
- Alternative Title
- Prebake Temperature Dependence of Development Characteristics in the Positive-Tone Novolak Resist
- Periodical title
- 高分子論文集 = Japanese journal of polymer science and technology
- No. or year of volume/issue
- 69(2):2012
- Volume
- 69
- Issue
- 2
- Pages
- 77-83