RF酸素プラズマ照射を特長とした併用式スパッタ法によるTa₂O₅固体電解質薄膜の作製
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- Material Type
- 記事
- Author/Editor
- 種子田 浩志東丸 幸江清 文博 他
- Alternative Title
- Preparation of Ta₂O₅ solid electrolyte thin film by a combination sputtering method with radio-frequency oxygen plasma irradiation
- Periodical title
- 都城工業高等専門学校研究報告 = Research report of Miyakonojo National College of Technology / 都城工業高等専門学校 編
- No. or year of volume/issue
- (46):2012.1
- Issue
- 46
- Pages
- 23-32
- Publication date of volume/issue (W3CDTF)
- 2012-01