TiN+MoS₂複合ターゲットを用いた高潤滑性硬質スパッタ膜の創成とその密着性の改善

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 78(3)=927:2012.3

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Material Type: 記事
Title: TiN+MoS₂複合ターゲットを用いた高潤滑性硬質スパッタ膜の創成とその密着性の改善
Author/Editor: 神崎昌郎
鈴木孝幸
Author Heading: 神崎昌郎
鈴木孝幸
Alternative Title: Preparation of High Lubricious and Hard Sputtered Films with TiN+MoS₂ Composite Target and Improvement of Their Adhesive Strength
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 78(3)=927:2012.3
Volume: 78
Issue: 3
Sequential issue number: 927
Pages: 241-245
Publication date of volume/issue (W3CDTF): 2012-03
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: sputtering
thin film
TiN
MoS₂
frictional property
adhesive strength
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023578684
http://id.ndl.go.jp/bib/023578684
Bibliographic Record Category (NDL): 632