一次元回折格子のピッチ校正の最新動向 (特集最新AFM技術)

一次元回折格子のピッチ校正の最新動向

(特集最新AFM技術)

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Material Type: 記事
Title: 一次元回折格子のピッチ校正の最新動向
Author/Editor: 三隅伊知子
Series Title: 特集最新AFM技術
Author Heading: 三隅伊知子
Periodical title: O plus E : Optics + electronics
No. or year of volume/issue: 34(3)=388:2012.3
Volume: 34
Issue: 3
Sequential issue number: 388
Pages: 235-238
Publication date of volume/issue (W3CDTF): 2012-03
ISSN (Periodical Title): 0911-5943
ISSN-L (Periodical Title): 0911-5943
Publication (Periodical Title): 東京 : アドコム・メディア
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1465
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023584479
http://id.ndl.go.jp/bib/023584479
Bibliographic Record Category (NDL): 632