レーザー生成プラズマ...

レーザー生成プラズマ極端紫外光源の高出力・長寿命化技術 (実用化に向かう極端紫外リソグラフィー)

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レーザー生成プラズマ極端紫外光源の高出力・長寿命化技術

(実用化に向かう極端紫外リソグラフィー)

Call No. (NDL)
Z15-269
Bibliographic ID of National Diet Library
023593793
Material type
記事
Author
藤本 准一ほか
Publisher
東京 : 日本光学会
Publication date
2012-03
Material Format
Paper
Journal name
光学 = Japanese journal of optics : publication of the Optical Society of Japan 41(3):2012.3
Publication Page
p.125-131
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Paper

Material Type
記事
Author/Editor
藤本 准一
溝口 計
Alternative Title
High Power and Long Lifetime Technology for Laser Produced Plasma Extreme Ultraviolet Light Source
Periodical title
光学 = Japanese journal of optics : publication of the Optical Society of Japan
No. or year of volume/issue
41(3):2012.3
Volume
41
Issue
3