Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 寺澤 恒男山根 武
- Series Title
- Alternative Title
- At Wavelength Inspection of 6-inch Extreme Ultraviolet Lithography Mask Blank
- Periodical title
- 光学 = Japanese journal of optics : publication of the Optical Society of Japan
- No. or year of volume/issue
- 41(3):2012.3
- Volume
- 41
- Issue
- 3