ナノ立体形状の定量計測 : 探針補正技術と高感度光干渉変位センサー (特集 測る : 社会・産業分野に貢献する計測技術)
Read via the Internet
Begin reading now
NDL Digital Collections
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 渡辺 正浩中田 俊彦
- Series Title
- Alternative Title
- Quantitative Measurement of 3D Nanostructure Devices : Probe Deformation Correction Technique and Highly Sensitive Interferometric Displacement Sensor
- Periodical title
- 日立評論
- No. or year of volume/issue
- 94(2)=1080:2012.2
- Volume
- 94
- Issue
- 2