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アークイオンプレーティング法によるITO膜の内部応力に及ぼす結晶化の影響

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アークイオンプレーティング法によるITO膜の内部応力に及ぼす結晶化の影響

Call No. (NDL)
Z17-291
Bibliographic ID of National Diet Library
023672501
Material type
記事
Author
小島 啓安ほか
Publisher
東京 : 表面技術協会
Publication date
2012-04
Material Format
Paper
Journal name
表面技術 = Journal of the Surface Finishing Society of Japan 63(4):2012.4
Publication Page
p.272-274
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Paper

Material Type
記事
Author/Editor
小島 啓安
齋藤 永宏
高井 治
Alternative Title
Effects of Crystallization on Internal Stress of ITO Films
Periodical title
表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue
63(4):2012.4
Volume
63
Issue
4
Pages
272-274