MEMS技術による小型高感度赤外線アレイセンサ (特集 デバイス)
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- Material Type
- 記事
- Author/Editor
- 山中 浩吉田 岳司
- Series Title
- Alternative Title
- Small-Sized, Highly Sensitive Infrared Array Sensor Using MEMS Technology
- Periodical title
- パナソニック技報 = Panasonic technical journal
- No. or year of volume/issue
- 58(1):2012.4
- Volume
- 58
- Issue
- 1