多層コーティング法におけるBNスパッタリング特性について

Journal name: プラズマ応用科学 = Applied plasma science : journal of IAPS 19(2):2011.12

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Material Type: 記事
Title: 多層コーティング法におけるBNスパッタリング特性について
Author/Editor: 細田誠也
張科寅
金子亮太郎他
Author Heading: 細田誠也
張科寅
金子亮太郎
Alternative Title: Sputtering Characteristic of BN in Multilayer Coating Method
Periodical title: プラズマ応用科学 = Applied plasma science : journal of IAPS
No. or year of volume/issue: 19(2):2011.12
Volume: 19
Issue: 2
Pages: 151-154
Publication date of volume/issue (W3CDTF): 2011-12
ISSN (Periodical Title): 1340-3214
ISSN-L (Periodical Title): 1340-3214
Publication (Periodical Title): [茨木] : プラズマ応用科学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Hall thruster
Multilayer coating method
Boron nitride
Xenon
Sputtering yield
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-B41
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 023776682
http://id.ndl.go.jp/bib/023776682
Bibliographic Record Category (NDL): 632