窒化物半導体のハイドライド気相成長技術の現状と課題 (省エネ創エネを牽引(けんいん)する窒化物ワイドギャップ半導体)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 纐纈 明伯
- Series Title
- Author Heading
- Alternative Title
- Current status and future of the hydride vapor phase epitaxy of nitride semiconductors
- Periodical title
- 応用物理
- No. or year of volume/issue
- 81(6):2012.6
- Volume
- 81
- Issue
- 6