触媒表面基準エッチングによる単結品SiC,GaN,ZnO表面の平滑化 (特集 酸化物表面のウェットプロセス)
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- Material Type
- 記事
- Author/Editor
- 山内 和人佐野 泰久有馬 健太
- Series Title
- Alternative Title
- Smoothing of Single Crystalline SiC, GaN and ZnO by Catalyst Referred Etching
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 33(6):2012.6
- Volume
- 33
- Issue
- 6