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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 川原村 敏幸王 大鵬古田 守
- Alternative Title
- Development of the Novel Thin Film Fabrication Technology using Mist, "Mist CVD" and Oxide TFT with a-IGZO/AlOx Stack Grown under Atmosphere by the Mist CVD
- Periodical title
- 高知工科大学紀要 = Research bulletin / 高知工科大学 編
- No. or year of volume/issue
- 9(1):2012
- Volume
- 9
- Issue
- 1
- Pages
- 37-53