新しい熱型マイクロ3軸加速度センサの提案
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- Material Type
- 記事
- Title
- Author/Editor
- 豊島 克久
- Author Heading
- Alternative Title
- Proposal of a new thermal micro 3-axis acceleration sensor
- Periodical title
- 研究報告 = Bulletin of Tokyo Metropolitan Industrial Technology Research Institute / 東京都立産業技術研究センター [編]
- No. or year of volume/issue
- (7):2012
- Issue
- 7
- Pages
- 14-17
- Publication date of volume/issue (W3CDTF)
- 2012