Gravure & Interview 精密工学の最前線躍動感あふれる超精密プラナリゼーションCMP技術の広い応用分野とその発展に向けて

Journal name: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編 78(10)=934:2012.10

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Material Type: 記事
Title: Gravure & Interview 精密工学の最前線躍動感あふれる超精密プラナリゼーションCMP技術の広い応用分野とその発展に向けて
Author/Editor: 土肥俊郎
森田剛
Author Heading: 土肥俊郎
森田剛
Alternative Title: Gravure & Interview : The Planarization and CMP Technical Committee
Periodical title: 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会編
No. or year of volume/issue: 78(10)=934:2012.10
Volume: 78
Issue: 10
Sequential issue number: 934
Pages: 825-828
Publication date of volume/issue (W3CDTF): 2012-10
ISSN (Periodical Title): 0912-0289
ISSN-L (Periodical Title): 0912-0289
Publication (Periodical Title): 東京 : 精密工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN12
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-466
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024026596
http://id.ndl.go.jp/bib/024026596
Bibliographic Record Category (NDL): 632