多品種小量生産履歴データに基づく半導体ウェハ加工プロセス予測制御モデルの構築手法 : MCMC法による統計的予測モデル構築のエンジニアリングサービス実現 (特集 サービス工学)
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- Material Type
- 記事
- Author/Editor
- 玉置 研二金子 俊一
- Series Title
- Alternative Title
- Method to Build a Predictive Control Model for a Semiconductor Wafer Process Based on Historical Data of Many Products in Small Quantities : Statistical Predictive Model for Engineering Service Using MCMC Method
- Periodical title
- 日本経営工学会論文誌 = Journal of Japan Industrial Management Association
- No. or year of volume/issue
- 63(3):2012.10
- Volume
- 63
- Issue
- 3