Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 徳永 裕樹生方 映徳矢野 良樹 他
- Series Title
- Alternative Title
- High growth rate AlN and AlGaN on large diameter Si substrate(6inch & 8inch)
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 112(329):2012.11.29・30
- Volume
- 112
- Issue
- 329