Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 吉田 智洋小林 健悟尾辻 泰一 他
- Series Title
- Alternative Title
- InGaAs HEMTs with T-gate electrodes formed by multi-layer SiCN molds
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 112(380):2013.1.17・18
- Volume
- 112
- Issue
- 380