部分一括露光パターン抽出効率向上化技術の提案

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Material Type: 記事
Title: 部分一括露光パターン抽出効率向上化技術の提案
Author/Editor: 野里博和
松縄哲明
坂無英徳他
Author Heading: 野里博和
松縄哲明
坂無英徳
Alternative Title: Improving the Efficiency of Pattern Extraction for Character Projection Lithography
Periodical title: 情報処理学会論文誌 IPSJ journal : 論文誌ジャーナル
No. or year of volume/issue: 49(5) 2008.5
Volume: 49
Issue: 5
Pages: 1702-1712
Publication date of volume/issue (W3CDTF): 2008-05
ISSN (Periodical Title): 1882-7837
ISSN-L (Periodical Title): 0387-5806
Publication (Periodical Title): 東京 : 情報処理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM13
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: YH247-743
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024268988
http://id.ndl.go.jp/bib/024268988
Bibliographic Record Category (NDL): 632