精密工学会アフィリエ...

精密工学会アフィリエイト 博士論文 レーザ照射によるシリコンの除去・変形・接合

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精密工学会アフィリエイト 博士論文 レーザ照射によるシリコンの除去・変形・接合

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
024277921
Material type
記事
Author
細野 高史
Publisher
東京 : 精密工学会
Publication date
2013-02
Material Format
Paper
Journal name
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編 79(2)=938:2013.2
Publication Page
p.151-153
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Paper

Material Type
記事
Author/Editor
細野 高史
Author Heading
Periodical title
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
No. or year of volume/issue
79(2)=938:2013.2
Volume
79
Issue
2
Sequential issue number
938
Pages
151-153