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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 安藤 康高陳 声遠野田 佳雅 他
- Alternative Title
- Influence of Feedstock Feed Rate on Quality of Titanium Oxide Film in Atmospheric Thermal Plasma CVD Using Vortex Ar Plasma
- Periodical title
- プラズマ応用科学 = Applied plasma science : journal of IAPS
- No. or year of volume/issue
- 20(2):2012.12
- Volume
- 20
- Issue
- 2
- Pages
- 99-104