コンディショニングによる研磨パッド表面の微小面内変位特性の評価
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- Material Type
- 記事
- Author/Editor
- 畝田 道雄表 辰憲澁谷 和孝 他
- Alternative Title
- Evaluation of the in-plane micro-deformation distribution characteristics of polishing pad surface by conditioning process
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 57(4)=368:2013.4
- Volume
- 57
- Issue
- 4
- Sequential issue number
- 368